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Shota Otobe
Shota Otobe
Microelectromechanical systems
Electrode
Optoelectronics
Accelerometer
Materials science
5
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A Study on SCD Electrodes for Au-Proof-Mass 3-axis MEMS Accelerometer (2)
2019
The Japan Society of Applied Physics
Takashi Ichikawa
Shota Otobe
Ken Atsumi
Tatsuya Koga
Daisuke Yamane
Shinichi Iida
Hiroyuki Ito
Noboru Ishihara
Katsuyuki Machida
Masato Sone
Kazuya Masu
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A study on pillar-shaped capacitance-detection electrodes by the multi-layer metal technology
2019
The Japan Society of Applied Physics
Ken Atsumi
Shota Otobe
Tatsuya Koga
Takashi Ichikawa
Daisuke Yamane
Shin’ichi Iida
Hiroyuki Ito
Noboru Ishihara
Masato Sone
Katsuyuki Machida
Kazuya Masu
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A Study on SCD Electrodes for Au-Proof-Mass 3-axis MEMS Accelerometer
2019
The Japan Society of Applied Physics
Shota Otobe
Ken Atsumi
Tatsuya Koga
Daisuke Yamane
Shin’ichi Iida
Hiroyuki Ito
Noboru Ishihara
Katsuyuki Machida
Masato Sone
Kazuya Masu
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A Study on Brownian Noise Evaluation of High-sensitivity MEMS Accelerometers
2018
The Japan Society of Applied Physics
Hirofumi Niijima
Shota Otobe
Motohiro Takayasu
Daisuke Yamane
Toshifumi Konishi
Teruaki Safu
Hiroyuki Ito
Hiroshi Toshiyoshi
Katsuyuki Machida
Kazuya Masu
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A Tri-axis MEMS Accelerometer with a Gold Electroplated Single-proof-mass and Segmented Electrodes
2017
Shota Otobe
Daisuke Yamane
Toshifumi Konishi
Teruaki Safu
Hiroyuki Ito
Shiro Dosho
Noboru Ishihara
Katsuyuki Machida
Kazuya Masu
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