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Emission Dependent on composition of Si-rich-SiNX Films obtained by PECVD
Emission Dependent on composition of Si-rich-SiNX Films obtained by PECVD
2017
J.A. Jaramillo Gómez
T. V. Torchynska
J.L. Casas Espinola
J. A. Bentosa Gutiérrez
L. Khomenkova
A. Slaoui
Keywords:
Analytical chemistry
Materials science
Plasma-enhanced chemical vapor deposition
Chemical engineering
Composition (visual arts)
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