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A process for the manufacture of integrated multi-layer microfluidic components
A process for the manufacture of integrated multi-layer microfluidic components
1999
Ann Cynthia Briscoe
W. Jeremy Burdon
Yuk-Tong Chan
Xunhu Dai
Barenburg Barbara Foley
Ross Sean Gallagher
Piotr Grodzinski
Rong Fong Huang
Robert Marrero
J. Nicholas Naclerio
David L. Wilcox
Huinan Yu
Keywords:
Microfluidics
Materials science
Electronic engineering
multi layer
Nanotechnology
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