Microstructures and Properties of Composite Films Fabricated by Aerosol Deposition of Nanoparticle Coated BaTiO 3

The composite particles were fabricated by dry coating of nanosized silica (~10 nm) on BaTiO 3 (~300 nm). The composite particles showed the better flowability due to the reduction of interparticle adhesion force. Aerosol deposition (AD) of the composite particles resulted in the dense film with less residual stress and better insulating characteristic, compared to that made from BaTiO 3 powder only.