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Atmospheric Pressure Glow Discharge Plasma in Nitrogen and its Application to Chemical Vapor Deposition
Atmospheric Pressure Glow Discharge Plasma in Nitrogen and its Application to Chemical Vapor Deposition
2006
Eiichi Suetomi
Toshio Tsuji
Kazuhiro Fukuda
Saito Atsushi
Koji Fukazawa
Akira Nishiwaki
Keywords:
Atmospheric pressure
Chemical vapor deposition
Analytical chemistry
Nitrogen
glow discharge plasma
Materials science
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