Fabrication of silicon-on-glass waveguides
2005
The method to fabricate silicon-on-glass materials for the applications of integrated optics and photonics is proposed. Anodic boning and selective etching are employed. SOG-based rib waveguides and nano-films are then studied.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
9
References
1
Citations
NaN
KQI