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Role of Cerium Oxide Surface Chemistry in Adsorption of Polyacrylic Acid in CMP Slurries
Role of Cerium Oxide Surface Chemistry in Adsorption of Polyacrylic Acid in CMP Slurries
2016
Shashank Saraf
Ali Mesbahi
James K. Harper
Sudipta Seal
Keywords:
Adsorption
Cerium oxide
Inorganic chemistry
Materials science
Slurry
Polyacrylic acid
Chemical engineering
Chemistry
Correction
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