Formation of noble-metal nitrides by nitrogen implantation☆

Abstract Up till now, no definite evidence for the formation of noble-metal nitride by direct nitrogen implantation has been reported. In the present study, Cu, Ag and Au films were implanted by 80 keV nitrogen at RT to the doses ranging from 5 × 10 16 to 2 × 10 18 N/cm 2 . AgN 3 and CuN 3 phases were observed by TEM SAD pattern after implantation to a dose of 2 × 10 18 N/cm 2 . Besides, ESCA spectra showed the formation of weak bonding among Ag and N atoms. Experimental results for Au thin films are also reported. Based on the experimental evidence, the importance of thermodynamic factor and the growth kinetics in nitride formation under implantation condition is discussed.