Elemental characterization of Al nanoparticles buried under a Cu thin film - TOF-SIMS vs. STEM/EDX.

Agnieszka Priebe,Jean-Paul Barnes,Thomas Edward James Edwards,Emese Huszár,Laszlo Pethö,Johann Michler

Elemental characterization of Al nanoparticles buried under a Cu thin film - TOF-SIMS vs. STEM/EDX.

2020

Agnieszka Priebe
Jean-Paul Barnes
Thomas Edward James Edwards
Emese Huszár
Laszlo Pethö
Johann Michler

In this work we present a comprehensive comparison of Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) and Scanning Transmission Electron Microscope combined with Energy-Dispersive X-ray S...

Keywords:

Thin film
Chemistry
Analytical chemistry
Secondary ion mass spectrometry
Nanoparticle
Scanning transmission electron microscopy

Correction
Source
Cite
Save
Machine Reading By IdeaReader

References

Citations