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Critical Dimension Uniformity characterization of nanoimprinted trenches for high volume manufacturing qualification
Critical Dimension Uniformity characterization of nanoimprinted trenches for high volume manufacturing qualification
2016
Hubert Teyssedre
Stefan Landis
C. Thanner
V. Schauer
M. Laure
W. Zorbach
Laurent Pain
Sandra Bos
Martin Eibelhuber
Markus Wimplinger
Keywords:
Nanotechnology
Critical dimension
Materials science
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