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Influence of Rapid Thermal Annealing on Structures of Ge Thin Films Grown at Low Temperature
Influence of Rapid Thermal Annealing on Structures of Ge Thin Films Grown at Low Temperature
2016
Shintaro Otsuka
Mori Takahiro
Morita Yukinori
Uchida Noriyuki
Liu Yongxun
Ouchi Shin-ichi
Fuketa Hiroshi
Migita Shinji
Masahara Meisyoku
Matsukawa Takashi
Keywords:
Thin film
Radiochemistry
Annealing (metallurgy)
Sputtering
Epitaxy
Germanium
Materials science
Optoelectronics
rapid thermal annealing
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