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Processing of Cavities in SiC Material for Quantum Technologies
Processing of Cavities in SiC Material for Quantum Technologies
2018
Rachael L. Myers-Ward
Karl D. Hobart
Kevin M. Daniels
Alexander J. Giles
Marko J. Tadjer
Lunet E Luna
Francis J. Kub
Shojan P. Pavunny
Sam Carter
Hunter B. Banks
E. R. Glaser
P. B. Klein
Boris N. Feygelson
D. Kurt Gaskill
Keywords:
Quantum technology
Composite material
Materials science
Epitaxy
Engineering physics
Metallurgy
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