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Effect of Intermetal Dielectric Layer On the Interpoly Dielectric Properties of Nonvolatile Memory Devices
Effect of Intermetal Dielectric Layer On the Interpoly Dielectric Properties of Nonvolatile Memory Devices
2013
Jin-Yong Ryoo
Suk-kang Sung
Yong-Sik Yim
Juneui Song
Wang Chul Shin
Jai Hyuk Song
Du Heon Song
Jeong-Hyuk Choi
Yonghan Roh
Keywords:
Non-volatile memory
Dielectric
Electronic engineering
Acoustics
Materials science
dielectric layer
Optoelectronics
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