Old Web
English
Sign In
Acemap
>
Paper
>
Optimization of Gallium Nitride Metalorganic Chemical Vapor Deposition Process
Optimization of Gallium Nitride Metalorganic Chemical Vapor Deposition Process
2015
Pradeep George
Jiandong Meng
Yogesh Jaluria
Keywords:
Thermodynamics
Physical chemistry
Chemical physics
Chemical vapor deposition
Gallium nitride
Physics
Response surface methodology
Computational fluid dynamics
Chemical engineering
engineering simulation
Correction
Source
Cite
Save
Machine Reading By IdeaReader
56
References
4
Citations
NaN
KQI
[]