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Fabrication of Sub-10 nm Metal Wire Circuits using Directed Self-Assembly of Block Copolymers
Fabrication of Sub-10 nm Metal Wire Circuits using Directed Self-Assembly of Block Copolymers
2016
Tsukasa Azuma
Yuriko Seino
Hironobu Sato
Yusuke Kasahara
Katsutoshi Kobayashi
Hitoshi Kubota
Hideki Kanai
Katsuyoshi Kodera
Naoko Kihara
Yoshiaki Kawamonzen
Shinya Minegishi
Ken Miyagi
Hitoshi Yamano
Toshikatsu Tobana
Masayuki Shiraishi
Satoshi Nomura
Keywords:
Electronic circuit
Organic chemistry
Self-assembly
Nanotechnology
Copolymer
Materials science
Lithography
Metal
Photochemistry
Fabrication
directed self assembly
Correction
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