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Comparison of Sputtered Titanium Nitride on Silicon Dioxide and Aluminum-Alloy Thin Films
Comparison of Sputtered Titanium Nitride on Silicon Dioxide and Aluminum-Alloy Thin Films
1997
J. L. Drown
S. M. Merchant
M. E. Gross
D. J. Eaglesham
Lucille A. Giannuzzi
R. B. Irwin
Keywords:
Alloy
Materials science
Titanium nitride
Aluminium
Thin film
Metallurgy
Silicon dioxide
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