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Excess low temperature heat capacity in a-Si:H thin films prepared by hot-wire CVD
Excess low temperature heat capacity in a-Si:H thin films prepared by hot-wire CVD
2010
Daniel Queen
F. Hellman
Richard S. Crandall
Qi Wang
Keywords:
Thermodynamics
Amorphous solid
Thin film
Combustion chemical vapor deposition
Heat capacity
Composite material
Carbon film
Materials science
Chemical engineering
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