The Design of Three-Axis Accelerometer Based on SOI

In order to solve the problem that the mechanical precision of three-axis accelerometer is low now,a three-axis accelerometer based on SOI with single mass is introduced.The accelerometer has four beams and the three Wheatstone bridges are designed according to the variation of the resistors when the inertial force is acting on the structure,the resistors are etched at where the stress is maximal on the beam,so the bridges can detect the acceleration vector.The structure model is established and analyzed by using ANSYS software,at last a feasible technics process is designed.