Rapid homoepitaxial growth of (010) β-Ga2O3 thin films via mist chemical vapor deposition

Abstract We achieved rapid homoepitaxial growth of β-Ga2O3 thin films with smooth surfaces using a mist chemical vapor deposition (CVD) process. A smooth film was grown at a rate of 3.2 μm/h using a concentrated aqueous solution of the GaCl3 precursor. Homoepitaxial growth of a smooth (010) β-Ga2O3 thin film was achieved via mist CVD at 750 °C, and the growth of β-Ga2O3 in different orientations was not observed. The GaCl3 precursor was highly soluble in water and enabled the rapid growth of homoepitaxial β-Ga2O3 thin films with smooth surfaces.