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Impact of Nitrogen Profile in Gate Oxynitride on CMOS Characteristics
Impact of Nitrogen Profile in Gate Oxynitride on CMOS Characteristics
1999
Yasuyuki Tamura
Mayumi Shigeno
Satoshi Okubo
Kiyoshi Irino
Toshiro Nakanishi
Kanetake Takasaki
Keywords:
Nitrogen
CMOS
Electronic engineering
Materials science
Optoelectronics
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