Laser process of transparent conducting surfaces for terahertz bandpass ultrathin metamaterials

Terahertz (THz) optoelectronics have great potentials in communication, imaging, sensing and security applications. However, the state-of-the-art fabrication processes for THz devices are costly and time-consuming. In this work, we present a novel laser-based metamaterial fabrication (LMF) process for high-throughput fabrication of transparent conducting surfaces on dielectric substrates such as quartz and transparent polymers to achieve tunable THz bandpass filtering characteristics. The LMF process comprises two steps: (1) applying ultrathin-film metal deposition, with a typical thickness of 10 nm, on the dielectric substrate; (2) creating periodic surface pattern with a feature size of ~100 microns on the metal film using nanosecond pulsed laser ablation. Our results demonstrate the LMF-fabricated ultra-thin metal film exhibits newly integrated functionalities: (a) highly conductive with sheet resistance of ~20 Ω/sq; (b) optically transparent with visible transmittance of ~70%; (c) tunable bandpass filtering effect in the THz frequency range; and (d) extraordinary mechanical durability during repeated fatigue bending cycles. The scientific findings from this work will render an economical and scalable manufacturing technique capable of treating large surface area for multi-functional THz metamaterials.