Microfabricated ChipforCalibration ofField Instruments

Accurate, periodic calibration isrequired to design. Extensive workonvaporgeneration systems has operate IMS,GC, andportal security systems with alsobeenperformed, butthese systems lackthesmall maximumefficiency, surety, andoperator confidence. To footprint andtheability toproduce standardized samples this end,wearepresently developing a microfabricated desired bytheusercommunity.(3) Othertechnical work device foron-demand calibration offieldable contrabandusessorbent traps, whichrequire thetraps tobeloaded detection instruments. Usingrobotically-assi sted picoliter onsite using laboratory equipment, orpreloaded andstored dispensing methods, precise nanogram orlarger amounts of atnearfreezing temperatures.(4) Newerworkinvolving calibration compound(s) areplaced onmicron-sized bridgeprecision explosives deposition onswabsheets cannot be structures. Resistively heating these structures deliverseasily integrated withfield systems norautomated, making precisely quantified low-levels ofcalibration compounds to itsusceptible toerror fromhumanandenvironmental thedetector systems. This provides reliable calibration for factors. identification andquantification ofexplosives, narcotics, Wehavedeveloped amicrofabricated device consisting ofa andother contraband. micro-bridge array withdozens ofindividual elements coated withprecise nanogram(orlarger) amountsof ~~~~~~~SOI wafer.Thismaskdefined trenches across thedevice contraband detection. Additionally, a major problem for thatwouldservetobothrelease themicro-bridges and external calibration methods isadsorption ofthedesireddefine thesubsequent flowpath through thedevice. This levels ofanalyte tothetransfer lines between thesourceand final Boschetchprogressed through thehandle waferand theinstrument inlet. stopped ontheburied oxide.Aftermaskremoval, a Tocreate afieldable calibration source, other research has buffered oxide etch ordryplasma etch stripped theoxide to produced highvolatility vapors fromthermal decomposition fully release thebridge elements. After dicing, eachwafer ofthermally labile salts (2), though thiseffort doesnot yielded 124devices ofapproximately 630pmx800 - m, feature ashighadensity ofcalibrant charges asthework eachcontaining 20bridge elements. Figure 1showsa shownhere, anditisbased onaless physically robust completed device witha detail ofthesuspended micro- bridges.