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Effect on DLC film composition for fabrication of DLC nanostructures by O2 plasma etching
Effect on DLC film composition for fabrication of DLC nanostructures by O2 plasma etching
2014
Toru Harigai
Keywords:
Nanostructure
Plasma etching
Composite material
Materials science
Etching
Nanotechnology
o2 plasma
Fabrication
Correction
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