The microstructure of and films

(PZT 53/47) is a polycrystalline film with coarse square-shaped grains. The surface morphology can be improved by reducing the cooling rate at the Curie temperature region; however this morphology still does not meet the requirement of device engineering. (PZT 20/80) film has been synthesized, to reduce the lattice mismatch between PZT and substrate. This film has a smooth surface without any evident crystalline features. A TEM of the cross-sectional (YBCO) integrated film shows there is no interaction between the PZT, YBCO and substrate. particles are detected in the PZT film.