Apparatus and method tetramethylammonium hydroxide recycling

The present invention relates to apparatus and method for recycling tetramethylammonium hydroxide, particularly a thin film transistor liquid crystal display and other electronics and semiconductor manufacturing industries recovery tetramethylammonium hydroxide solution used. Recycling apparatus of the present invention is tetramethylammonium hydroxide (TMAH) of a waste liquid tank, the ion exchange resin beds, etc. precipitation reactor. Systems and methods provided herein, other impurities photoresist developer resin or the like can be removed to give the purpose of TMAH electronic grade. Simple structure, continuous production, recycling, cost savings, reduce pollution, easy to spread use.