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Influence of Adsorbed Gas Species on Activation Process and Pumping Performance for NEG Coating
Influence of Adsorbed Gas Species on Activation Process and Pumping Performance for NEG Coating
2021
Xiuguang Jin
Yasunori Tanimoto
Takashi Uchiyama
Tohru Honda
Keywords:
process
Adsorption
Chemical engineering
Coating
Materials science
Correction
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