High-density and high-speed 128Mb chain FeRAM™ with SDRAM-compatible DDR2 interface

Novel cell technologies are successfully developed for the world's highest-density and highest-speed 128 Mb chain FeRAMtrade with SDRAM-compatible 1.6 GByte/s DDR2 interface. To overcome the signal window reduction due to the capacitor shrinkage, new cell technologies such as half-pitch layout with triangular capacitors, advanced nestled chain structure, high-density cover film and low-damage etching technique are established. New architecture with small bit line capacitance of 60 fF is also installed. With these new technologies, the cell signal window reaches 380 mV, which is sufficient for stable 128 Mb 1T1C operation.