Three-dimensional subsurface imaging with laser ablation/AFM

New method for 3D nano-scale imaging was developed that combines a traditional scanning probe techniques with a local laser ablation processing of the surface of a sample. The technology opens new possibilities for ultra precise (down to atomic resolution) subsurface studies, whereas the traditional SPM sensitivity is limited to only few atomic layers. We demonstrate that our new experimental set-up can also be used for other investigations, e.g. in in situ characterization of surface processing. The approach is potentially interesting for many applications, like volume nano-imaging, in situ studies of a stimulated nano-assembling or growth, monitoring of laser processing and cleaning, etc.© (2003) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.