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Two Step RIE Process for Diamond‐Based Nanophotonics Structure Formation
Two Step RIE Process for Diamond‐Based Nanophotonics Structure Formation
2020
Anton V. Golovanov
Nikolay V. Luparev
Sergey Yu. Troschiev
S.A. Tarelkin
Viktoriia S. Shcherbakova
V. S. Bormashov
Keywords:
Structure formation
Nanophotonics
Diamond
Physics
Condensed matter physics
two step
Nanotechnology
Reactive-ion etching
Correction
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