A high-frequency epitaxially encapsulated single-drive quad-mass tri-axial resonant tuning fork gyroscope

This paper introduces a ‘high-frequency’ resonant tri-axial tuning fork gyroscope (TFG) with a single-drive mode of operation. The quad-mass device is implemented on a 2×2 mm2 vacuum-packaged die fabricated using the epi-seal process, making this one of the smallest wafer-level packaged 3-axis gyros. In contrast to conventional resonant TFGs, the resonant frequencies are designed to be relatively high (∼138 kHz) permitting high bandwidth for mode-matched operation and enhancing resistance to shock and vibration. The results show sensitivity to all three axes with mode-matched operation for the Z-axis and mode-split for the X- and Y-axes.