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Gas phase reaction study of gan in cold wall mocvd reactor by induction heating
Gas phase reaction study of gan in cold wall mocvd reactor by induction heating
2019
Ligen Lu
Zhiming Li
Lili Zhao
Runqiu Guo
Lansheng Feng
Keywords:
Induction heating
Metalorganic vapour phase epitaxy
Chemical engineering
Materials science
gas phase
Correction
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