Study of Phase Formations in ε-FeSi Layers by Pulsed Laser Annealing

Pulsed laser annealing has been applied on e-FeSi layers in order to study the formation of (meta)stable iron silicides. Laser shots of different energy density were applied and/or the number of laser shots was also varied. Characterisation was performed using Rutherford Backscattering Spectroscopy (RBS)/Channelling and Conversion Electron Mossbauer Spectroscopy (CEMS). The reaction mechanisms of the Fe/Si system as well as the stability of the phases are discussed.