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Numerical Study of the Flow in the Semiconductor Wafer Cleaner by OpenFOAM
Numerical Study of the Flow in the Semiconductor Wafer Cleaner by OpenFOAM
2018
Shinichiro Yanase
Tsubasa Aoyama
Toshinori Kouchi
Yasunori Nagata
Yuki Miyoshi
Keywords:
Mechanical engineering
Wafer
Flow (psychology)
Materials science
Correction
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