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[INVITED] Advances in nitride film and coating growth by chemical vapor deposition
[INVITED] Advances in nitride film and coating growth by chemical vapor deposition
2017
Michel Pons
Danying Chen
Manoel Jacquemin
Juan Su
Raphaël Boichot
Frederic Mercier
Elisabeth Blanquet
Sabine Lay
Keywords:
Ion plating
Chemical vapor deposition
Thin film
Hybrid physical-chemical vapor deposition
Physical vapor deposition
Combustion chemical vapor deposition
Electron beam physical vapor deposition
Plasma-enhanced chemical vapor deposition
Inorganic chemistry
Materials science
Chemical engineering
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