Thermally Stable and Radiation Hard Ferroelectric Hf0.5Zr0.5O2 Thin Films on Muscovite Mica for Flexible Nonvolatile Memory Applications

Wenwu Xiao,Chen Liu,Yue Peng,Shuaizhi Zheng,Qian Feng,Chunfu Zhang,Jincheng Zhang,Yue Hao,Min Liao,Yichun Zhou

Thermally Stable and Radiation Hard Ferroelectric Hf0.5Zr0.5O2 Thin Films on Muscovite Mica for Flexible Nonvolatile Memory Applications

2019

Wenwu Xiao
Chen Liu
Yue Peng
Shuaizhi Zheng
Qian Feng
Chunfu Zhang
Jincheng Zhang
Yue Hao
Min Liao
Yichun Zhou

Metal–ferroelectric–metal (MFM) capacitors on flexible substrates are promising for flexible nonvolatile memory applications, while the insufficient scalability of perovskite-based ferroelectric th...

Keywords:

Ferroelectricity
Capacitor
Muscovite
Mica
Thin film
Optoelectronics
Materials science
Non-volatile memory
Radiation
Perovskite

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