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Densification, a Key Issue of the Atomic Layer Deposition of Hafnia onto Silicon: A Multimodel Investigation
Densification, a Key Issue of the Atomic Layer Deposition of Hafnia onto Silicon: A Multimodel Investigation
2009
Alain Estève
Cédric Mastail
Stéphane Olivier
Mehdi Djafari-Rouhani
Georges Landa
A. Dkhissi
Keywords:
Hafnia
Atomic layer deposition
Inorganic chemistry
Materials science
Silicon
Nanotechnology
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