Old Web
English
Sign In
Acemap
>
Paper
>
A Review on Dielectric Breakdown in Thin Dielectrics: Silicon Dioxide, High‐ k , and Layered Dielectrics
A Review on Dielectric Breakdown in Thin Dielectrics: Silicon Dioxide, High‐ k , and Layered Dielectrics
2019
Felix Palumbo
Chao Wen
Salvatore Lombardo
Sebastian Pazos
Fernando L. Aguirre
Moshe Eizenberg
Fei Hui
Mario Lanza
Keywords:
High-κ dielectric
Inorganic chemistry
Dielectric
Materials science
Dielectric strength
Silicon dioxide
Chemical engineering
Correction
Source
Cite
Save
Machine Reading By IdeaReader
157
References
47
Citations
NaN
KQI
[]