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Fabrication of self-sustained membranes using PECVD SiOxNy films
Fabrication of self-sustained membranes using PECVD SiOxNy films
2000
Alexandre T. Lopes
Marco Isaías Alayo Chávez
Marcelo Nelson Paez Carreño
Inés Pereyra
Keywords:
Membrane
Nanotechnology
Materials science
Plasma-enhanced chemical vapor deposition
Fabrication
Correction
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