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Chemical trends of n -type doping of Al, Ga, In, and Ti donors for magnetron-sputtered ZnO polycrystalline films
Chemical trends of n -type doping of Al, Ga, In, and Ti donors for magnetron-sputtered ZnO polycrystalline films
2021
Junichi Nomoto
Hisao Makino
Tetsuo Tsuchiya
Tetsuya Yamamoto
Keywords:
Crystallite
Cavity magnetron
Sputtering
Analytical chemistry
Doping
Dopant
Materials science
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