Materials Analysis by Ion Channeling: Submicron Crystallography

Preface. Acknowledgments. Glossary of Symbols. Introduction. Interaction of Ion Beams with Surfaces. Channeling within the Crystal. Particle Distributions within the Channel. Dechanneling by Defects. Defect Depth Distributions. Surfaces. Surface Layers and Interfaces. Epitaxial Layers. Impurity-Defect Interactions. Appendix A. Atomic Scattering Concepts. Appendeix B: Lecture Notes on Channeling and the Continuum Potential.