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Analytical TEM Characterization of Source/Drain Contacts in Advanced Semiconductor Devices
Analytical TEM Characterization of Source/Drain Contacts in Advanced Semiconductor Devices
2018
Junjun Li
Hiroaki Niimi
Oleg Gluschenkov
Praneet Adusumilli
Jody A. Fronheiser
Shogo Mochizuki
Zuoguang Liu
Vimal Kamineni
M. Raymond
Adra V. Carr
Tenko Yamashita
B. Veeraraghavan
N. Saulnier
J. Gaudiello
Keywords:
Analytical chemistry
Semiconductor device
Materials science
Electronic engineering
Engineering physics
Metallurgy
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