Old Web
English
Sign In
Acemap
>
Paper
>
Hafnium Oxide Based CMOS Compatible Ferroelectric Materials
Hafnium Oxide Based CMOS Compatible Ferroelectric Materials
2013
Uwe Schroeder
Stefan Mueller
Johannes Mueller
Ekaterina Yurchuk
Dominik Martin
C. Adelmann
Till Schloesser
R. van Bentum
Thomas Mikolajick
Keywords:
Compatibility (mechanics)
Hafnium oxide
Nanotechnology
CMOS
Ferroelectricity
Inorganic chemistry
Chemistry
cmos compatible
Correction
Source
Cite
Save
Machine Reading By IdeaReader
18
References
74
Citations
NaN
KQI
[]