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The Temperature Optimization in RF Heating for a MOCVD Susceptor By Using Numerical Methods
The Temperature Optimization in RF Heating for a MOCVD Susceptor By Using Numerical Methods
2014
Jin Fu Lu
Chih Kai Hu
Tomi T. Li
Keywords:
Metalorganic vapour phase epitaxy
Numerical analysis
Susceptor
Analytical chemistry
Dielectric heating
Materials science
Optoelectronics
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