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Formation of TiN barrier layer by the two - step rapid thermal conversion process for Cu Metallization
Formation of TiN barrier layer by the two - step rapid thermal conversion process for Cu Metallization
1996
Youn Tae Kim
Chi Hoon Jun
Jin Ho Lee
Jong Tae Baek
Hyung Joon Yoo
Keywords:
Barrier layer
Thermal
Inorganic chemistry
Tin
Forensic engineering
Chemistry
two step
Chemical engineering
Correction
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