Fully integrated hybrid silicon free-space beam steering source with 32 channel phased array

Free-space beam steering using optical phased arrays is a promising method for implementing free-space communication links and Light Detection and Ranging (LIDAR) without the sensitivity to inertial forces and long latencies which characterize moving parts. Implementing this approach on a silicon-based photonic integrated circuit adds the additional advantage of working with highly developed CMOS processing techniques. In this work we discuss our progress in the development of a fully integrated 32 channel PIC with a widely tunable diode laser, a waveguide phased array, an array of fast phase modulators, an array of hybrid III-V/silicon amplifiers, surface gratings, and a graded index lens (GRIN) feeding an array of photodiodes for feedback control. The PIC has been designed to provide beam steering across a 15°x5° field of view with 0.6°x0.6° beam width and background peaks suppressed 15 dB relative to the main lobe within the field of view for arbitrarily chosen beam directions. Fabrication follows the hybrid silicon process developed at UCSB with modifications to incorporate silicon diodes and a GRIN lens.