Monte-Carlo Simulation of Rarefied Vapor Flow of Aluminum in an Air-to-Air Metallizer

The direct simulation Monte-Carlo method has been used to study the behavior of rarefied vapor flow of aluminum through deposition equipment, where the space between the crucible and the film is surrounded by hood-shaped channels. Aluminum other than that deposited on the film is mostly trapped on the channel walls and recycled.The utilization of aluminum calculated by the simulation is in good agreement with the experimental results.