Standardization of Measurement of Nitrogen Concentration in CZ Silicon Crystals

Standards for the measurement procedures of nitrogen concentration in CZ silicon crystals were established for infrared absorption spectroscopy (IR), secondary ion mass spectroscopy (SIMS) and charged particle activation analysis (CPAA) for concentration above 1x10 14 atoms/cm 3 . Good agreement was obtained between the laboratory within the same method and between the three methods. Conversion coefficient from (weighted sum of) absorption coefficients to nitrogen concentration agreed well with the previous one.