Facile batch mode process for high capacity rechargeable nickel-zinc microbatteries

This paper reports a facile approach for batch mode fabrication of millimeter-scale Ni-Zn batteries that is facilitated by unconventional structural materials and fabrication options. Micro electrodischarge machining (μEDM) is used to define arrays of cavities in foils of Ni and Zn. The cathode and electrolyte materials are incorporated using a self-aligned damascene method. The fabricated batteries have a footprint of =0.048 cm 2 , a nominal voltage of 1.7 V, and a typical capacity of =63 μAh. These batteries provide sufficient power and energy density for millimeter-scale autonomous microsystems that are being actively developed for health and wellness, as well as environmental applications. The fabrication process can be scaled to manufacture large arrays of microbatteries.