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Measuring IVDF through high-aspect holes in pulsed ICP plasma
Measuring IVDF through high-aspect holes in pulsed ICP plasma
2015
Gilles Cunge
M. Darnon
Jerome Dubois
Philippe Bézard
O. Mourey
Camille Petit-Etienne
L. Vallier
Emilie Despiau-Pujo
Olivier Joubert
Nader Sadeghi
Keywords:
Inductively coupled plasma
Analytical chemistry
Materials science
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