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Jerome Dubois

Centre national de la recherche scientifique

5

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14

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High density H2 and He plasmas: Can they be used to treat graphene?

2018 Journal of Applied Physics
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Helium plasma modification of Si and Si3N4 thin films for advanced etch processes

2018 Journal of Vacuum Science and Technology
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Measuring ion velocity distribution functions through high-aspect ratio holes in inductively coupled plasmas

2016 Applied Physics Letters
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Measuring IVDF through high-aspect holes in pulsed ICP plasma

2015 Bulletin of the American Physical Society
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Diagnostics of Pulsed Hydrogen Plasmas

2014 Bulletin of the American Physical Society
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